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Microscope à force atomique modélisation, estimation et contrôle


Directeur de thèse :     Alina VODA

École doctorale : Electronique, electrotechnique, automatique, traitement du signal (EEATS)

Spécialité : Automatique et productique

Structure de rattachement : UJF

Établissement d'origine : Université BRNO

Financement(s) : autres financements


Date d'entrée en thèse : 01/04/2004

Date de soutenance : 13/07/2007


Composition du jury :
Didier Georges , Prof. UJF/GIPSA,Président
Pavel Tomanek , Prof. BUT/UFYZ, Brno,Rep.Tchèque, Rapporteur
Antoine Ferreira , MCF ENSI/LVR Bourges, Rapporteur
Alina Voda ,MCF UJF/GIPSA , Directeur de thèse
Joel Chevrier ,Prof. UJF/Institut Néel, co-Directeur de thèse
Pavel Jura ,Prof. BUT/UAMT , co-Directeur de thèse
Frantisek Zezulka , Prof. BUT/UAMT ,Examinateur


Résumé : The presented work concentrates on a complete and deep understanding of the Atomic Force Microscopy (AFM) from the control point of view. This analysis allows us to propose improvements for the AFMs standard functions. Furthermore, with this knowledge we can design a new technique to operate the Atomic Force Microscope. Control approach plays an important role in all this development but profound understanding of the instruments physics has to be reached as well. The thesis can be divided into four parts: A short overview of the most important techniques to operate the Scanning Probe Microscope and more precisely the Atomic Force Microscope are presented. This part should unveil advantages and difficulties of the existing techniques. The second part concentrates on the modeling of surface interactions and the dynamic of the cantilever with the tip. The simulation of a thermally excited cantilever model are compared with the measurements obtained with Nanotec AFM. The simulation of Amplitude Modulation and Tapping mode with the goal to explore the importance of the cantilever higher harmonic modes for these measurement methods is presented. An application of state observer techniques to AFM is presented. Two observer applications to AFM in Amplitude Modulation technique and a new static force measurement are shown. Both methods permit to directly detect interaction force while using standard AFM. new operation mode of AFM based on static measurement of the interaction force is proposed. A theoretical definition and description of a new operation mode called Cooling mode is given. The main advantages and disadvantages compared to the standard AFM operation modes are listed to see the functionality improvements and limitations. A new designs of capacitive actuators are presented. Experimental setup used to prove this concept is designed and identified. This information allows us to design a stabilizing controller using pole placement techniques and obtain a robust control system that can efficiently attenuate the thermal distortion of the cantilever. A model of the entire experimental system has been constructed and simulation of the complete system has been performed to show results similar to the experimental data. The real-time measurement results are presented at the end.

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